TechRussia, Belarus roll out prototype 130-nanometer lithography machine
Russia and Belarus have manufactured a prototype 130-nanometer lithography machine, First Deputy Prime Minister Denis Manturov said. He added that Russia developed its own excimer laser for the system, placing it among the few countries with the technology. Electron-beam lithography and production of chip materials and chemicals are also advancing.
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TASS★★★☆☆2026-09-28 11:41Original
Russia, Belarus roll out prototype 130-nanometer lithography machine